Equipment Information
Thermo Fisher Scientific PhenomXL G2 Desktop SEM · Scanning Electron Microscope
- Internal Name: SEM02
Description
Desktop scanning electron microscope (SEM) with energy dispersive spectroscopy (EDS): Quick, high-quality surface imaging and chemical analysis Sample areas up to 100mm x 100mm (40mm thick) Resolution down to 10nm The system possesses 3 detectors: Four-segment backscattered electron detector for sharp imaging and chemical contrast. Secondary electron detector for surface sensitive imaging. EDS system for elemental analysis.
Process Type(s)
Metrology
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