Hitachi SU8320 High Resolution

Scanning Electron Microscope
Unavailable until 26 Oct, 14:00 Bay 11C Translational Research Hub
Internal name
SEM01
Process types
Metrology
Description
Hitachi SU8320 ultra-high-resolution cold field-emission scanning electron microscope (FE-SEM) for imaging fine surface structure at the nanoscale, with an in-lens detection system for high-quality low-voltage imaging. Fitted with a Bruker EDX system incorporating X-Flash and FlatQuad detectors for elemental microanalysis, including large-solid-angle analysis of rough or non-planar samples.
SEM01 image