ECM Technologies JIPELEC JetFirst300

Rapid Thermal Annealer

Unavailable until 26 Oct, 12:30 Bay 13A Translational Research Hub

Internal name

RTA2

Process types

Thermal Processing

Description

Annealing of metal-semiconductor contacts over 300mm with a controlled N2 or O2 atmosphere. Thermocouple or pyrometer temperature control upto 1200 °C.