ECM Technologies JIPELEC JetFirst300

Rapid Thermal Annealer

Bay 13A Translational Research Hub

Internal name

RTA2

Equipment managers

Tyrone Jones

Saleem Shabbir

Process types

Thermal Processing

Description

Annealing of metal-semiconductor contacts over 300mm with a controlled N2 or O2 atmosphere. Thermocouple or pyrometer temperature control upto 1200 °C.