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Equipment
Oxford Instruments Plasma Pro800

Oxford Instruments Plasma Pro800

Plasma Deposition

Bay 10 Translational Research Hub

Internal name

PECVD2

Equipment managers

Elizabeth Beaumont

Stuart Thomas

Process types

Plasma Etch and Deposition

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QR code linking to PECVD2

Scans to

https://ics-cardiff.co.uk/equipment/pecvd2/

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