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Equipment
SPTS Technologies DELTA

SPTS Technologies DELTA

Plasma Deposition

Bay 10 Translational Research Hub

Internal name

PECVD1

Equipment managers

Elizabeth Beaumont

Stuart Thomas

Process types

Plasma Etch and Deposition

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QR code linking to PECVD1

Scans to

https://ics-cardiff.co.uk/equipment/pecvd1/

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