Bank holiday 25 Dec
Bay 11A Translational Research Hub
Internal name
MIC03 (AXIO)
Process types
Metrology
Description
Motorised upright reflected and transmitted light microscope for materials inspection, cleanroom-certified for wafer and photomask work. The Vario column accommodates large samples up to 300mm laterally on a motorised XYZ stage with hardware autofocus, with objectives from 5x to 100x supporting brightfield, darkfield, DIC and polarisation contrast. Semi-automatic mapping available.