SUSS MicroTec MCS8

Hot Plate
Unavailable until 26 Oct, 12:30 Bay 05 Translational Research Hub
Internal name
MCS8 HP8 3.2
Process types
Resist Coat and Develop
Description
Programmable hotplate module (HP8) within the SUSS MicroTec MCS8 resist-processing cluster, handling substrates up to 200mm. Provides controlled, uniform soft-bake, post-exposure bake and hard-bake with recipe-set temperature and time. One of two hotplate modules in the MCS8 system (see HP8 3.1).
MCS8 HP8 3.2 image