SUSS MicroTec MA6 Mask Aligner WD-33-MAN

Mask Aligner
Unavailable until 26 Oct, 12:30 Bay 04 Translational Research Hub
Internal name
MA06
Process types
Optical Lithography
Description
Photolithographic tool with a 1000W Hg UV lamp. Soft, hard, vacuum and soft-vacuum contact modes.
MA06 image