SUSS MicroTec HMx9 Mask Cleaner

Puddle Mask Cleaner

Bay 04 Translational Research Hub

Internal name

HMX9

Equipment managers

Tyrone Jones

Michael Lewis

Process types

Optical Lithography Wet Processing

Description

The HMx9 is manually loaded with automatic sequential processing, designed for high-quality piranha mask cleaning. Fully programable, point-of-use mixing for process control.