Plasma Etch Inc PE-75 Venus

Plasma Asher

N/3.07 Queen's Buildings

Internal name

ASH01

Equipment managers

Tyrone Jones

Saleem Shabbir

Process types

Plasma Etch and Deposition

Description

The PE-75 is a plasma asher ideal for plasma ashing semiconductor wafers. The versatile PE-75 comes with two gases installed for other cleaning and ashing purposes.