SUSS MicroTec AD12

Puddle Developer
Bay 05 Translational Research Hub
Internal name
AD12
Equipment managers
Tyrone Jones
Michael Lewis
Process types
Resist Coat and Develop
Description
SUSS MicroTec’s manual wet-processing system AD12 offers superior developing functions for aqueous media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm.
AD12 image