Equipment Information
SUSS MicroTec AD12 · Puddle Developer
- Internal Name: AD12
Description
SUSS MicroTec’s manual wet-processing system AD12 offers superior developing functions for aqueous media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm.
Process Type(s)
Resist Coat and Develop
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